INVESTIGATION OF LATTICE DEFORMATION OF POROUS SILICON FILMS BY X-RAY DOUBLE CRYSTAL DIFFRACTION

HE XIAN-CHANG; WU ZI-QIN; ZHAO TE-XIU; Lü ZHI-HUI; WANG XIAO-PING; SUN GUO-XI

doi:10.7498/aps.42.954

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HE XIAN-CHANG, WU ZI-QIN, ZHAO TE-XIU, Lü ZHI-HUI, WANG XIAO-PING, SUN GUO-XI. INVESTIGATION OF LATTICE DEFORMATION OF POROUS SILICON FILMS BY X-RAY DOUBLE CRYSTAL DIFFRACTIONJ. Acta Physica Sinica, 1993, 42(6): 954-962. DOI: 10.7498/aps.42.954

Citation:

HE XIAN-CHANG, WU ZI-QIN, ZHAO TE-XIU, Lü ZHI-HUI, WANG XIAO-PING, SUN GUO-XI. INVESTIGATION OF LATTICE DEFORMATION OF POROUS SILICON FILMS BY X-RAY DOUBLE CRYSTAL DIFFRACTIONJ. Acta Physica Sinica, 1993, 42(6): 954-962. DOI: 10.7498/aps.42.954

Citation:

HE XIAN-CHANG, WU ZI-QIN, ZHAO TE-XIU, Lü ZHI-HUI, WANG XIAO-PING, SUN GUO-XI. INVESTIGATION OF LATTICE DEFORMATION OF POROUS SILICON FILMS BY X-RAY DOUBLE CRYSTAL DIFFRACTIONJ. Acta Physica Sinica, 1993, 42(6): 954-962. DOI: 10.7498/aps.42.954