HYDRODYNAMICS SIMULATION OF RF DISCHARGE COURSES WITH NEGATIVE BIAS

ZHU WU-BIAO; WANG YOU-NAIN; DENG XIN-LU; MA TENG-CAI

doi:10.7498/aps.45.1138

ZHU WU-BIAO, WANG YOU-NAIN, DENG XIN-LU, MA TENG-CAI. HYDRODYNAMICS SIMULATION OF RF DISCHARGE COURSES WITH NEGATIVE BIASJ. Acta Physica Sinica, 1996, 45(7): 1138-1145. DOI: 10.7498/aps.45.1138

Citation:

ZHU WU-BIAO, WANG YOU-NAIN, DENG XIN-LU, MA TENG-CAI. HYDRODYNAMICS SIMULATION OF RF DISCHARGE COURSES WITH NEGATIVE BIASJ. Acta Physica Sinica, 1996, 45(7): 1138-1145. DOI: 10.7498/aps.45.1138

Citation:

ZHU WU-BIAO, WANG YOU-NAIN, DENG XIN-LU, MA TENG-CAI. HYDRODYNAMICS SIMULATION OF RF DISCHARGE COURSES WITH NEGATIVE BIASJ. Acta Physica Sinica, 1996, 45(7): 1138-1145. DOI: 10.7498/aps.45.1138