EXPERIMENTAL STUDY ON DIFFRACTIVE PERFORMANCE OF CONCAVE GROOVES WITH SUBMICRON WIDTH

ZHENG SHI-HAI; LI DE-HUA; CHEN YAN-SONG; DAI LUN

doi:10.7498/aps.45.1292

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ZHENG SHI-HAI, LI DE-HUA, CHEN YAN-SONG, DAI LUN. EXPERIMENTAL STUDY ON DIFFRACTIVE PERFORMANCE OF CONCAVE GROOVES WITH SUBMICRON WIDTHJ. Acta Physica Sinica, 1996, 45(8): 1292-1296. DOI: 10.7498/aps.45.1292

Citation:

ZHENG SHI-HAI, LI DE-HUA, CHEN YAN-SONG, DAI LUN. EXPERIMENTAL STUDY ON DIFFRACTIVE PERFORMANCE OF CONCAVE GROOVES WITH SUBMICRON WIDTHJ. Acta Physica Sinica, 1996, 45(8): 1292-1296. DOI: 10.7498/aps.45.1292

Citation:

ZHENG SHI-HAI, LI DE-HUA, CHEN YAN-SONG, DAI LUN. EXPERIMENTAL STUDY ON DIFFRACTIVE PERFORMANCE OF CONCAVE GROOVES WITH SUBMICRON WIDTHJ. Acta Physica Sinica, 1996, 45(8): 1292-1296. DOI: 10.7498/aps.45.1292