STUDY OF BORON-DOPED DIAMOND FILMS BY HOT FILAMENT CVD

LIAO KE-JUN; WANG WAN-LU; ZHANG ZHEN-GANG; WU BIN

doi:10.7498/aps.45.1771

LIAO KE-JUN, WANG WAN-LU, ZHANG ZHEN-GANG, WU BIN. STUDY OF BORON-DOPED DIAMOND FILMS BY HOT FILAMENT CVDJ. Acta Physica Sinica, 1996, 45(10): 1771-1776. DOI: 10.7498/aps.45.1771

Citation:

LIAO KE-JUN, WANG WAN-LU, ZHANG ZHEN-GANG, WU BIN. STUDY OF BORON-DOPED DIAMOND FILMS BY HOT FILAMENT CVDJ. Acta Physica Sinica, 1996, 45(10): 1771-1776. DOI: 10.7498/aps.45.1771

Citation:

LIAO KE-JUN, WANG WAN-LU, ZHANG ZHEN-GANG, WU BIN. STUDY OF BORON-DOPED DIAMOND FILMS BY HOT FILAMENT CVDJ. Acta Physica Sinica, 1996, 45(10): 1771-1776. DOI: 10.7498/aps.45.1771