XIAO DING-QUAN, WEI LI-FAN, LI ZI-SEN, ZHU JIAN-GUO, QIAN ZHENG-HONG, PENG WEN-BIN. MODELLING OF MULTI-ION-BEAM REACTIVE COSPUTTERING OF METAL OXIDE THIN FILMS (I)——ESTABLISHMENT OF THE MODELJ. Acta Physica Sinica, 1996, 45(2): 330-338. DOI: 10.7498/aps.45.330
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Citation:
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XIAO DING-QUAN, WEI LI-FAN, LI ZI-SEN, ZHU JIAN-GUO, QIAN ZHENG-HONG, PENG WEN-BIN. MODELLING OF MULTI-ION-BEAM REACTIVE COSPUTTERING OF METAL OXIDE THIN FILMS (I)——ESTABLISHMENT OF THE MODELJ. Acta Physica Sinica, 1996, 45(2): 330-338. DOI: 10.7498/aps.45.330
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XIAO DING-QUAN, WEI LI-FAN, LI ZI-SEN, ZHU JIAN-GUO, QIAN ZHENG-HONG, PENG WEN-BIN. MODELLING OF MULTI-ION-BEAM REACTIVE COSPUTTERING OF METAL OXIDE THIN FILMS (I)——ESTABLISHMENT OF THE MODELJ. Acta Physica Sinica, 1996, 45(2): 330-338. DOI: 10.7498/aps.45.330
|
Citation:
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XIAO DING-QUAN, WEI LI-FAN, LI ZI-SEN, ZHU JIAN-GUO, QIAN ZHENG-HONG, PENG WEN-BIN. MODELLING OF MULTI-ION-BEAM REACTIVE COSPUTTERING OF METAL OXIDE THIN FILMS (I)——ESTABLISHMENT OF THE MODELJ. Acta Physica Sinica, 1996, 45(2): 330-338. DOI: 10.7498/aps.45.330
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