CHEN GUO, GUO XIAO-XU, ZHU MEI-FANG, SUN JING-LAN, XU HUAI-ZHE, HAN YI-QIN. INVESTIGATION OF GROWTH MECHANISM OF NANOCRYSTALLINE SILICON THIN FILMS PREPARED BY HOT-FILAMENT CHEMICAL VAPOR DEPOSITIONJ. Acta Physica Sinica, 1997, 46(10): 2015-2022. DOI: 10.7498/aps.46.2015
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Citation:
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CHEN GUO, GUO XIAO-XU, ZHU MEI-FANG, SUN JING-LAN, XU HUAI-ZHE, HAN YI-QIN. INVESTIGATION OF GROWTH MECHANISM OF NANOCRYSTALLINE SILICON THIN FILMS PREPARED BY HOT-FILAMENT CHEMICAL VAPOR DEPOSITIONJ. Acta Physica Sinica, 1997, 46(10): 2015-2022. DOI: 10.7498/aps.46.2015
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CHEN GUO, GUO XIAO-XU, ZHU MEI-FANG, SUN JING-LAN, XU HUAI-ZHE, HAN YI-QIN. INVESTIGATION OF GROWTH MECHANISM OF NANOCRYSTALLINE SILICON THIN FILMS PREPARED BY HOT-FILAMENT CHEMICAL VAPOR DEPOSITIONJ. Acta Physica Sinica, 1997, 46(10): 2015-2022. DOI: 10.7498/aps.46.2015
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Citation:
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CHEN GUO, GUO XIAO-XU, ZHU MEI-FANG, SUN JING-LAN, XU HUAI-ZHE, HAN YI-QIN. INVESTIGATION OF GROWTH MECHANISM OF NANOCRYSTALLINE SILICON THIN FILMS PREPARED BY HOT-FILAMENT CHEMICAL VAPOR DEPOSITIONJ. Acta Physica Sinica, 1997, 46(10): 2015-2022. DOI: 10.7498/aps.46.2015
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