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中国物理学会期刊
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CHEN JUN-FANG, WANG WEI-XIANG, LIU SONG-HAO, REN ZHAO-XING. MICROSTRUCTURE OF SILICON NITRIDE THIN FILMJ. Acta Physica Sinica, 1998, 47(9): 1529-1535. DOI: 10.7498/aps.47.1529
Citation: CHEN JUN-FANG, WANG WEI-XIANG, LIU SONG-HAO, REN ZHAO-XING. MICROSTRUCTURE OF SILICON NITRIDE THIN FILMJ. Acta Physica Sinica, 1998, 47(9): 1529-1535. DOI: 10.7498/aps.47.1529
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MICROSTRUCTURE OF SILICON NITRIDE THIN FILM

Acta Phys. Sin., 1998, 47(9): 1529-1535.
DOI: 10.7498/aps.47.1529
CSTR: 32037.14.aps.47.1529
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