STUDIES OF CNx FILMS DEPOSITED BY MEANS OF MICROWAVE PLASMA CVD METHOD

XIN YU; FAN SHU-PING; DI GUO-QING; SHEN MING-RONG; GAN ZHAO-QIANG

doi:10.7498/aps.47.154

Search

x

XIN YU, FAN SHU-PING, DI GUO-QING, SHEN MING-RONG, GAN ZHAO-QIANG. STUDIES OF CNx FILMS DEPOSITED BY MEANS OF MICROWAVE PLASMA CVD METHODJ. Acta Physica Sinica, 1998, 47(1): 154-159. DOI: 10.7498/aps.47.154

Citation:

XIN YU, FAN SHU-PING, DI GUO-QING, SHEN MING-RONG, GAN ZHAO-QIANG. STUDIES OF CNx FILMS DEPOSITED BY MEANS OF MICROWAVE PLASMA CVD METHODJ. Acta Physica Sinica, 1998, 47(1): 154-159. DOI: 10.7498/aps.47.154

Citation:

XIN YU, FAN SHU-PING, DI GUO-QING, SHEN MING-RONG, GAN ZHAO-QIANG. STUDIES OF CNx FILMS DEPOSITED BY MEANS OF MICROWAVE PLASMA CVD METHODJ. Acta Physica Sinica, 1998, 47(1): 154-159. DOI: 10.7498/aps.47.154