CHARACTERISTIC ELECTRON ENERGY LOSS SPECTRA IN SiC BURIED LAYERS FORMED BY C+ IMPLANTATION INTO CRYSTALLINE SILICON

YAN HUI; CHEN GUANG-HUA; S.P.WONG; R.W.M.KWOK

doi:10.7498/aps.47.876

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YAN HUI, CHEN GUANG-HUA, S.P.WONG, R.W.M.KWOK. CHARACTERISTIC ELECTRON ENERGY LOSS SPECTRA IN SiC BURIED LAYERS FORMED BY C+ IMPLANTATION INTO CRYSTALLINE SILICONJ. Acta Physica Sinica, 1998, 47(5): 876-880. DOI: 10.7498/aps.47.876

Citation:

YAN HUI, CHEN GUANG-HUA, S.P.WONG, R.W.M.KWOK. CHARACTERISTIC ELECTRON ENERGY LOSS SPECTRA IN SiC BURIED LAYERS FORMED BY C+ IMPLANTATION INTO CRYSTALLINE SILICONJ. Acta Physica Sinica, 1998, 47(5): 876-880. DOI: 10.7498/aps.47.876

Citation:

YAN HUI, CHEN GUANG-HUA, S.P.WONG, R.W.M.KWOK. CHARACTERISTIC ELECTRON ENERGY LOSS SPECTRA IN SiC BURIED LAYERS FORMED BY C+ IMPLANTATION INTO CRYSTALLINE SILICONJ. Acta Physica Sinica, 1998, 47(5): 876-880. DOI: 10.7498/aps.47.876