EFFECTS OF SELF-ION IRRADIATION ON SECONDARY DEFECTS IN MeV P+-IMPLANTED Si

TIAN REN-HE; ZHANG XIAO-JI; WU YU-GUANG; ZHANG HUI-XING

doi:10.7498/aps.47.952

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TIAN REN-HE, ZHANG XIAO-JI, WU YU-GUANG, ZHANG HUI-XING. EFFECTS OF SELF-ION IRRADIATION ON SECONDARY DEFECTS IN MeV P+-IMPLANTED SiJ. Acta Physica Sinica, 1998, 47(6): 952-959. DOI: 10.7498/aps.47.952

Citation:

TIAN REN-HE, ZHANG XIAO-JI, WU YU-GUANG, ZHANG HUI-XING. EFFECTS OF SELF-ION IRRADIATION ON SECONDARY DEFECTS IN MeV P+-IMPLANTED SiJ. Acta Physica Sinica, 1998, 47(6): 952-959. DOI: 10.7498/aps.47.952

Citation:

TIAN REN-HE, ZHANG XIAO-JI, WU YU-GUANG, ZHANG HUI-XING. EFFECTS OF SELF-ION IRRADIATION ON SECONDARY DEFECTS IN MeV P+-IMPLANTED SiJ. Acta Physica Sinica, 1998, 47(6): 952-959. DOI: 10.7498/aps.47.952