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中国物理学会期刊
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WU XIAN-CHENG, WANG YIN-YUE. PROPERTIES OF a-SiCxNy∶H FILMS PRODUCED BY REACTIVE-SPUTTERINGJ. Acta Physica Sinica, 1999, 48(1): 134-139. DOI: 10.7498/aps.48.134
Citation: WU XIAN-CHENG, WANG YIN-YUE. PROPERTIES OF a-SiCxNy∶H FILMS PRODUCED BY REACTIVE-SPUTTERINGJ. Acta Physica Sinica, 1999, 48(1): 134-139. DOI: 10.7498/aps.48.134
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PROPERTIES OF a-SiCxNy∶H FILMS PRODUCED BY REACTIVE-SPUTTERING

Acta Phys. Sin., 1999, 48(1): 134-139.
DOI: 10.7498/aps.48.134
CSTR: 32037.14.aps.48.134
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