In Situ Analysis of High Energetic Ion RBS Combined with Low Energetic  Ion Sputtering for Thin Films

Liu Bo; Jiang Lei; Zhou Zhu－ying; He Mian－hong; Zhao Guo－qing; Zong Xiang－fu

doi:10.7498/aps.49.164

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Liu Bo, Jiang Lei, Zhou Zhu－ying, He Mian－hong, Zhao Guo－qing, Zong Xiang－fu. In Situ Analysis of High Energetic Ion RBS Combined with Low Energetic Ion Sputtering for Thin FilmsJ. Acta Physica Sinica, 2000, 49(1): 164-169. DOI: 10.7498/aps.49.164

Citation:

Liu Bo, Jiang Lei, Zhou Zhu－ying, He Mian－hong, Zhao Guo－qing, Zong Xiang－fu. In Situ Analysis of High Energetic Ion RBS Combined with Low Energetic Ion Sputtering for Thin FilmsJ. Acta Physica Sinica, 2000, 49(1): 164-169. DOI: 10.7498/aps.49.164

Citation:

Liu Bo, Jiang Lei, Zhou Zhu－ying, He Mian－hong, Zhao Guo－qing, Zong Xiang－fu. In Situ Analysis of High Energetic Ion RBS Combined with Low Energetic Ion Sputtering for Thin FilmsJ. Acta Physica Sinica, 2000, 49(1): 164-169. DOI: 10.7498/aps.49.164