Effect of High－Temperature Treatment on the Crystallization of CNx Thin Films

Xiao Xing－cheng; Jiang Wei－hui; Tian Jing－fen; Song Li－xing; Hu Xing－fang

doi:10.7498/aps.49.173

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Xiao Xing－cheng, Jiang Wei－hui, Tian Jing－fen, Song Li－xing, Hu Xing－fang. Effect of High－Temperature Treatment on the Crystallization of CNx Thin FilmsJ. Acta Physica Sinica, 2000, 49(1): 173-176. DOI: 10.7498/aps.49.173

Citation:

Xiao Xing－cheng, Jiang Wei－hui, Tian Jing－fen, Song Li－xing, Hu Xing－fang. Effect of High－Temperature Treatment on the Crystallization of CNx Thin FilmsJ. Acta Physica Sinica, 2000, 49(1): 173-176. DOI: 10.7498/aps.49.173

Citation:

Xiao Xing－cheng, Jiang Wei－hui, Tian Jing－fen, Song Li－xing, Hu Xing－fang. Effect of High－Temperature Treatment on the Crystallization of CNx Thin FilmsJ. Acta Physica Sinica, 2000, 49(1): 173-176. DOI: 10.7498/aps.49.173