JU JIAN-HUA, XIA YI-BEN, ZHANG WEI-LI, WANG LIN-JUN, SHI WEI-MIN, HUANG ZHI-MING, LI ZHI-FENG, ZHENG GUO-ZHEN, TANG DING-YUAN. EFFECT OF NITROGEN ON THE RESIDUAL STRESS AND ADHESION OF DIAMOND-LIKE AMORPHOUS CARBON NITRIDE FILMSJ. Acta Physica Sinica, 2000, 49(11): 2310-2314. DOI: 10.7498/aps.49.2310