THE DIAGNOSTICS OF RF GLOW DISCHARGE PLASMA BY A PROBE AND ITS DATA PROCESS

YAO RUO-HE; CHI LING-FEI; LIN XUAN-YING; SHI WANG-ZHOU; LIN KUI-XUN

doi:10.7498/aps.49.922

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YAO RUO-HE, CHI LING-FEI, LIN XUAN-YING, SHI WANG-ZHOU, LIN KUI-XUN. THE DIAGNOSTICS OF RF GLOW DISCHARGE PLASMA BY A PROBE AND ITS DATA PROCESSJ. Acta Physica Sinica, 2000, 49(5): 922-925. DOI: 10.7498/aps.49.922

Citation:

YAO RUO-HE, CHI LING-FEI, LIN XUAN-YING, SHI WANG-ZHOU, LIN KUI-XUN. THE DIAGNOSTICS OF RF GLOW DISCHARGE PLASMA BY A PROBE AND ITS DATA PROCESSJ. Acta Physica Sinica, 2000, 49(5): 922-925. DOI: 10.7498/aps.49.922

Citation:

YAO RUO-HE, CHI LING-FEI, LIN XUAN-YING, SHI WANG-ZHOU, LIN KUI-XUN. THE DIAGNOSTICS OF RF GLOW DISCHARGE PLASMA BY A PROBE AND ITS DATA PROCESSJ. Acta Physica Sinica, 2000, 49(5): 922-925. DOI: 10.7498/aps.49.922