DIAGNOSTIC OF RF PLASMA BY USING LANGMUIR PROBE   AND ITS NUMERICAL PROCESSING

CHI LING-FEI; LIN KUI-XUN; YAO RUO-HE; LIN XUAN-YING; YU CHU-YING; YU YUN-PENG

doi:10.7498/aps.50.1313

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CHI LING-FEI, LIN KUI-XUN, YAO RUO-HE, LIN XUAN-YING, YU CHU-YING, YU YUN-PENG. DIAGNOSTIC OF RF PLASMA BY USING LANGMUIR PROBE AND ITS NUMERICAL PROCESSINGJ. Acta Physica Sinica, 2001, 50(7): 1313-1317. DOI: 10.7498/aps.50.1313

Citation:

CHI LING-FEI, LIN KUI-XUN, YAO RUO-HE, LIN XUAN-YING, YU CHU-YING, YU YUN-PENG. DIAGNOSTIC OF RF PLASMA BY USING LANGMUIR PROBE AND ITS NUMERICAL PROCESSINGJ. Acta Physica Sinica, 2001, 50(7): 1313-1317. DOI: 10.7498/aps.50.1313

Citation:

CHI LING-FEI, LIN KUI-XUN, YAO RUO-HE, LIN XUAN-YING, YU CHU-YING, YU YUN-PENG. DIAGNOSTIC OF RF PLASMA BY USING LANGMUIR PROBE AND ITS NUMERICAL PROCESSINGJ. Acta Physica Sinica, 2001, 50(7): 1313-1317. DOI: 10.7498/aps.50.1313