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中国物理学会期刊
LIAO MEI-YONG, QIN FU-GUANG, CHAI CHUN-LIN, LIU ZHI-KAI, YANG SHAO-YAN, YAO ZHEN-YU, WANG ZHAN-GUO. INFLUENCE OF ION ENERGY AND DEPOSITION TEMPERATURE ON THE SURFACE MORPHOLOGY OF CARBON FILMS DEPOSITED BY ION BEAMSJ. Acta Physica Sinica, 2001, 50(7): 1324-1328. DOI: 10.7498/aps.50.1324
Citation: LIAO MEI-YONG, QIN FU-GUANG, CHAI CHUN-LIN, LIU ZHI-KAI, YANG SHAO-YAN, YAO ZHEN-YU, WANG ZHAN-GUO. INFLUENCE OF ION ENERGY AND DEPOSITION TEMPERATURE ON THE SURFACE MORPHOLOGY OF CARBON FILMS DEPOSITED BY ION BEAMSJ. Acta Physica Sinica, 2001, 50(7): 1324-1328. DOI: 10.7498/aps.50.1324

INFLUENCE OF ION ENERGY AND DEPOSITION TEMPERATURE ON THE SURFACE MORPHOLOGY OF CARBON FILMS DEPOSITED BY ION BEAMS

CSTR: 32037.14.aps.50.1324
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