SELF-CONSISTENT DESCRIPTION OF A DC HOLLOW CATHODE   DISCHARGE AND ANALYSIS OF CATHODE SPUTTERING

LAI JIAN-JUN; YU JIAN-HUA; HUANG JIAN-JUN; WANG XIN-BING; QIU JUN-LIN

doi:10.7498/aps.50.1528

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LAI JIAN-JUN, YU JIAN-HUA, HUANG JIAN-JUN, WANG XIN-BING, QIU JUN-LIN. SELF-CONSISTENT DESCRIPTION OF A DC HOLLOW CATHODE DISCHARGE AND ANALYSIS OF CATHODE SPUTTERINGJ. Acta Physica Sinica, 2001, 50(8): 1528-1533. DOI: 10.7498/aps.50.1528

Citation:

LAI JIAN-JUN, YU JIAN-HUA, HUANG JIAN-JUN, WANG XIN-BING, QIU JUN-LIN. SELF-CONSISTENT DESCRIPTION OF A DC HOLLOW CATHODE DISCHARGE AND ANALYSIS OF CATHODE SPUTTERINGJ. Acta Physica Sinica, 2001, 50(8): 1528-1533. DOI: 10.7498/aps.50.1528

Citation:

LAI JIAN-JUN, YU JIAN-HUA, HUANG JIAN-JUN, WANG XIN-BING, QIU JUN-LIN. SELF-CONSISTENT DESCRIPTION OF A DC HOLLOW CATHODE DISCHARGE AND ANALYSIS OF CATHODE SPUTTERINGJ. Acta Physica Sinica, 2001, 50(8): 1528-1533. DOI: 10.7498/aps.50.1528