DEPOSITION OF HIGH-QUALITY c-BN FILM ENHANCED BY PULSED DC BIAS TECHNIQUE

TIAN JING-ZE; Lü FAN-XIU; XIA LI-FANG

doi:10.7498/aps.50.2258

TIAN JING-ZE, Lü FAN-XIU, XIA LI-FANG. DEPOSITION OF HIGH-QUALITY c-BN FILM ENHANCED BY PULSED DC BIAS TECHNIQUEJ. Acta Physica Sinica, 2001, 50(11): 2258-2262. DOI: 10.7498/aps.50.2258

Citation:

TIAN JING-ZE, Lü FAN-XIU, XIA LI-FANG. DEPOSITION OF HIGH-QUALITY c-BN FILM ENHANCED BY PULSED DC BIAS TECHNIQUEJ. Acta Physica Sinica, 2001, 50(11): 2258-2262. DOI: 10.7498/aps.50.2258

Citation:

TIAN JING-ZE, Lü FAN-XIU, XIA LI-FANG. DEPOSITION OF HIGH-QUALITY c-BN FILM ENHANCED BY PULSED DC BIAS TECHNIQUEJ. Acta Physica Sinica, 2001, 50(11): 2258-2262. DOI: 10.7498/aps.50.2258