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中国物理学会期刊
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YU JIAN-HUA, HUANG JIAN-JUN. PLASMA DIAGNOSIS OF RF DISCHARGE BY USING IMPEDANCE MEASUREMENTJ. Acta Physica Sinica, 2001, 50(12): 2403-2407. DOI: 10.7498/aps.50.2403
Citation: YU JIAN-HUA, HUANG JIAN-JUN. PLASMA DIAGNOSIS OF RF DISCHARGE BY USING IMPEDANCE MEASUREMENTJ. Acta Physica Sinica, 2001, 50(12): 2403-2407. DOI: 10.7498/aps.50.2403
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PLASMA DIAGNOSIS OF RF DISCHARGE BY USING IMPEDANCE MEASUREMENT

Acta Phys. Sin., 2001, 50(12): 2403-2407.
DOI: 10.7498/aps.50.2403
CSTR: 32037.14.aps.50.2403
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