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中国物理学会期刊
XIN YU, NING ZHAO-YUAN, GAN ZHAO-QIANG, LU XIN-HUA, FANG LIANG, CHENG SHAN-HUA. INFRARED ANALYSIS OF BOND CONFIGURATION FOR THE a-C∶F∶H FILMS DEPOSITED AT VARIABLE CHF3/CH4 FLOW RATIOSJ. Acta Physica Sinica, 2001, 50(12): 2492-2496. DOI: 10.7498/aps.50.2492
Citation: XIN YU, NING ZHAO-YUAN, GAN ZHAO-QIANG, LU XIN-HUA, FANG LIANG, CHENG SHAN-HUA. INFRARED ANALYSIS OF BOND CONFIGURATION FOR THE a-C∶F∶H FILMS DEPOSITED AT VARIABLE CHF3/CH4 FLOW RATIOSJ. Acta Physica Sinica, 2001, 50(12): 2492-2496. DOI: 10.7498/aps.50.2492

INFRARED ANALYSIS OF BOND CONFIGURATION FOR THE a-C∶F∶H FILMS DEPOSITED AT VARIABLE CHF3/CH4 FLOW RATIOS

CSTR: 32037.14.aps.50.2492
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