STUDIES ON THE FEATURE OF Si(111) SURFACE IMPLANTED  BY NITROGEN ATOM,MOLECULE AND CLUSTER IONS

WANG PEI-LU; LIU ZHONG-YANG; ZHENG SI-XIAO; LIAO XIAO-DONG; YANG CHAO-WEN; TANG A-YOU; SHI MIAN-GONG; YANG BEI-FANG; MIAO JING-WEI

doi:10.7498/aps.50.860

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WANG PEI-LU, LIU ZHONG-YANG, ZHENG SI-XIAO, LIAO XIAO-DONG, YANG CHAO-WEN, TANG A-YOU, SHI MIAN-GONG, YANG BEI-FANG, MIAO JING-WEI. STUDIES ON THE FEATURE OF Si(111) SURFACE IMPLANTED BY NITROGEN ATOM,MOLECULE AND CLUSTER IONSJ. Acta Physica Sinica, 2001, 50(5): 860-864. DOI: 10.7498/aps.50.860

Citation:

WANG PEI-LU, LIU ZHONG-YANG, ZHENG SI-XIAO, LIAO XIAO-DONG, YANG CHAO-WEN, TANG A-YOU, SHI MIAN-GONG, YANG BEI-FANG, MIAO JING-WEI. STUDIES ON THE FEATURE OF Si(111) SURFACE IMPLANTED BY NITROGEN ATOM,MOLECULE AND CLUSTER IONSJ. Acta Physica Sinica, 2001, 50(5): 860-864. DOI: 10.7498/aps.50.860

Citation:

WANG PEI-LU, LIU ZHONG-YANG, ZHENG SI-XIAO, LIAO XIAO-DONG, YANG CHAO-WEN, TANG A-YOU, SHI MIAN-GONG, YANG BEI-FANG, MIAO JING-WEI. STUDIES ON THE FEATURE OF Si(111) SURFACE IMPLANTED BY NITROGEN ATOM,MOLECULE AND CLUSTER IONSJ. Acta Physica Sinica, 2001, 50(5): 860-864. DOI: 10.7498/aps.50.860