Study on lowtemperature growth of AlN single crystal film by ECRPEMOCVD

Qin Fu-Wen; Gu Biao; Xu Yin; Yang Da-Zhi

doi:10.7498/aps.52.1240

Qin Fu-Wen, Gu Biao, Xu Yin, Yang Da-Zhi. Study on lowtemperature growth of AlN single crystal film by ECRPEMOCVDJ. Acta Physica Sinica, 2003, 52(5): 1240-1244. DOI: 10.7498/aps.52.1240

Citation:

Qin Fu-Wen, Gu Biao, Xu Yin, Yang Da-Zhi. Study on lowtemperature growth of AlN single crystal film by ECRPEMOCVDJ. Acta Physica Sinica, 2003, 52(5): 1240-1244. DOI: 10.7498/aps.52.1240

Citation:

Qin Fu-Wen, Gu Biao, Xu Yin, Yang Da-Zhi. Study on lowtemperature growth of AlN single crystal film by ECRPEMOCVDJ. Acta Physica Sinica, 2003, 52(5): 1240-1244. DOI: 10.7498/aps.52.1240