Blue photoluminescence of aSiOxNy films prepared by ECR-CVD

Xu Sheng-Hua; Xin Yu; Ning Zhao-Yuan; Cheng Shan-Hua; Huang Song; Lu Xin-Hua; Xiang Su-Liu; Chen Jun

doi:10.7498/aps.52.1287

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Xu Sheng-Hua, Xin Yu, Ning Zhao-Yuan, Cheng Shan-Hua, Huang Song, Lu Xin-Hua, Xiang Su-Liu, Chen Jun. Blue photoluminescence of aSiOxNy films prepared by ECR-CVDJ. Acta Physica Sinica, 2003, 52(5): 1287-1291. DOI: 10.7498/aps.52.1287

Citation:

Xu Sheng-Hua, Xin Yu, Ning Zhao-Yuan, Cheng Shan-Hua, Huang Song, Lu Xin-Hua, Xiang Su-Liu, Chen Jun. Blue photoluminescence of aSiOxNy films prepared by ECR-CVDJ. Acta Physica Sinica, 2003, 52(5): 1287-1291. DOI: 10.7498/aps.52.1287

Citation:

Xu Sheng-Hua, Xin Yu, Ning Zhao-Yuan, Cheng Shan-Hua, Huang Song, Lu Xin-Hua, Xiang Su-Liu, Chen Jun. Blue photoluminescence of aSiOxNy films prepared by ECR-CVDJ. Acta Physica Sinica, 2003, 52(5): 1287-1291. DOI: 10.7498/aps.52.1287