Preparation and characterization of the stable nc-Si/a-Si:H films

Xu Yan-Yue; Kong Guang-Lin; Zhang Shi-Bin; Hu Zhi-Hua; Zeng Xiang-Bo; Diao Hong-Wei; Liao Xian-Bo

doi:10.7498/aps.52.1465

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Xu Yan-Yue, Kong Guang-Lin, Zhang Shi-Bin, Hu Zhi-Hua, Zeng Xiang-Bo, Diao Hong-Wei, Liao Xian-Bo. Preparation and characterization of the stable nc-Si/a-Si:H filmsJ. Acta Physica Sinica, 2003, 52(6): 1465-1468. DOI: 10.7498/aps.52.1465

Citation:

Xu Yan-Yue, Kong Guang-Lin, Zhang Shi-Bin, Hu Zhi-Hua, Zeng Xiang-Bo, Diao Hong-Wei, Liao Xian-Bo. Preparation and characterization of the stable nc-Si/a-Si:H filmsJ. Acta Physica Sinica, 2003, 52(6): 1465-1468. DOI: 10.7498/aps.52.1465

Citation:

Xu Yan-Yue, Kong Guang-Lin, Zhang Shi-Bin, Hu Zhi-Hua, Zeng Xiang-Bo, Diao Hong-Wei, Liao Xian-Bo. Preparation and characterization of the stable nc-Si/a-Si:H filmsJ. Acta Physica Sinica, 2003, 52(6): 1465-1468. DOI: 10.7498/aps.52.1465