Search

x
中国物理学会期刊
Advanced Search
Jiang Le, Yang　De-Ｒen, Yu　Ｘue-Ｇong, Ma　Xiang-Yang, Xu Jin, Que Duan-Lin. Effect of nitrogen on oxygen precipitation in Czochralski silicon during high-te mperature annealingJ. Acta Physica Sinica, 2003, 52(8): 2000-2004. DOI: 10.7498/aps.52.2000
Citation: Jiang Le, Yang　De-Ｒen, Yu　Ｘue-Ｇong, Ma　Xiang-Yang, Xu Jin, Que Duan-Lin. Effect of nitrogen on oxygen precipitation in Czochralski silicon during high-te mperature annealingJ. Acta Physica Sinica, 2003, 52(8): 2000-2004. DOI: 10.7498/aps.52.2000
shu

Effect of nitrogen on oxygen precipitation in Czochralski silicon during high-te mperature annealing

Acta Phys. Sin., 2003, 52(8): 2000-2004.
DOI: 10.7498/aps.52.2000
CSTR: 32037.14.aps.52.2000
PDF
导出引用

  • Abstract

    Authors and contacts

    References

Turn off MathJax
Article Contents

Catalog

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return