Fabrication of silicon-on-insulator-multilayer structure by epitaxial layer transfer

Xie Xin-Yun; Lin Qing; Men Chuan-Ling; Liu Wei-Li; Xu An-Huai; Lin Cheng-Lu

doi:10.7498/aps.52.207

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Xie Xin-Yun, Lin Qing, Men Chuan-Ling, Liu Wei-Li, Xu An-Huai, Lin Cheng-Lu. Fabrication of silicon-on-insulator-multilayer structure by epitaxial layer transferJ. Acta Physica Sinica, 2003, 52(1): 207-210. DOI: 10.7498/aps.52.207

Citation:

Xie Xin-Yun, Lin Qing, Men Chuan-Ling, Liu Wei-Li, Xu An-Huai, Lin Cheng-Lu. Fabrication of silicon-on-insulator-multilayer structure by epitaxial layer transferJ. Acta Physica Sinica, 2003, 52(1): 207-210. DOI: 10.7498/aps.52.207

Citation:

Xie Xin-Yun, Lin Qing, Men Chuan-Ling, Liu Wei-Li, Xu An-Huai, Lin Cheng-Lu. Fabrication of silicon-on-insulator-multilayer structure by epitaxial layer transferJ. Acta Physica Sinica, 2003, 52(1): 207-210. DOI: 10.7498/aps.52.207