The study on the microstructure of TiN and Ti1-xSixNy coatings

Zhang Chen-Hui; Luo Jian-Bin; Li Wen-Zhi; Chen Da-Rong

doi:10.7498/aps.53.182

Zhang Chen-Hui, Luo Jian-Bin, Li Wen-Zhi, Chen Da-Rong. The study on the microstructure of TiN and Ti1-xSixNy coatingsJ. Acta Physica Sinica, 2004, 53(1): 182-188. DOI: 10.7498/aps.53.182

Citation:

Zhang Chen-Hui, Luo Jian-Bin, Li Wen-Zhi, Chen Da-Rong. The study on the microstructure of TiN and Ti1-xSixNy coatingsJ. Acta Physica Sinica, 2004, 53(1): 182-188. DOI: 10.7498/aps.53.182

Citation:

Zhang Chen-Hui, Luo Jian-Bin, Li Wen-Zhi, Chen Da-Rong. The study on the microstructure of TiN and Ti1-xSixNy coatingsJ. Acta Physica Sinica, 2004, 53(1): 182-188. DOI: 10.7498/aps.53.182