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中国物理学会期刊
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Yu Xiao-Mei, Zhang Da-Cheng, Wang Cong-Shun, Li Ting, Ruan Yong. A study of U-shaped micromachined cantilever arrayJ. Acta Physica Sinica, 2004, 53(1): 31-36. DOI: 10.7498/aps.53.31
Citation: Yu Xiao-Mei, Zhang Da-Cheng, Wang Cong-Shun, Li Ting, Ruan Yong. A study of U-shaped micromachined cantilever arrayJ. Acta Physica Sinica, 2004, 53(1): 31-36. DOI: 10.7498/aps.53.31
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A study of U-shaped micromachined cantilever array

Acta Phys. Sin., 2004, 53(1): 31-36.
DOI: 10.7498/aps.53.31
CSTR: 32037.14.aps.53.31
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