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中国物理学会期刊
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Huang Song, Ning Zhao-Yuan, Xin Yu, Gan Zhao-Qiang. Characteristics of two-electron-temperature in inductively coupled CF4 plasmasJ. Acta Physica Sinica, 2004, 53(10): 3394-3397. DOI: 10.7498/aps.53.3394
Citation: Huang Song, Ning Zhao-Yuan, Xin Yu, Gan Zhao-Qiang. Characteristics of two-electron-temperature in inductively coupled CF4 plasmasJ. Acta Physica Sinica, 2004, 53(10): 3394-3397. DOI: 10.7498/aps.53.3394
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Characteristics of two-electron-temperature in inductively coupled CF4 plasmas

Acta Phys. Sin., 2004, 53(10): 3394-3397.
DOI: 10.7498/aps.53.3394
CSTR: 32037.14.aps.53.3394
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