Low temperature fabrication of nanostructured Si-SiOx　and Si-SiNx composite films and their photoluminescence features

Ji Ai-Ling; Ma Li-Bo; Liu Cheng; Wang Yong-Qian

doi:10.7498/aps.53.3818

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Ji Ai-Ling, Ma Li-Bo, Liu Cheng, Wang Yong-Qian. Low temperature fabrication of nanostructured Si-SiOx　and Si-SiNx composite films and their photoluminescence featuresJ. Acta Physica Sinica, 2004, 53(11): 3818-3822. DOI: 10.7498/aps.53.3818

Citation:

Ji Ai-Ling, Ma Li-Bo, Liu Cheng, Wang Yong-Qian. Low temperature fabrication of nanostructured Si-SiOx　and Si-SiNx composite films and their photoluminescence featuresJ. Acta Physica Sinica, 2004, 53(11): 3818-3822. DOI: 10.7498/aps.53.3818

Citation:

Ji Ai-Ling, Ma Li-Bo, Liu Cheng, Wang Yong-Qian. Low temperature fabrication of nanostructured Si-SiOx　and Si-SiNx composite films and their photoluminescence featuresJ. Acta Physica Sinica, 2004, 53(11): 3818-3822. DOI: 10.7498/aps.53.3818