Microfabrication of magnetic tunnel junctions  on 4-inch Si/SiO＿2 substrate*

Wang Tian-Xing; Wei Hong-Xiang; Li Fei-Fei; Zhang Ai-Guo; Zeng Zh ong-Ming; Zhan Wen-Shan; Han Xiu-Feng

doi:10.7498/aps.53.3895

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Wang Tian-Xing, Wei Hong-Xiang, Li Fei-Fei, Zhang Ai-Guo, Zeng Zh ong-Ming, Zhan Wen-Shan, Han Xiu-Feng. Microfabrication of magnetic tunnel junctions on 4-inch Si/SiO＿2 substrate*J. Acta Physica Sinica, 2004, 53(11): 3895-3901. DOI: 10.7498/aps.53.3895

Citation:

Wang Tian-Xing, Wei Hong-Xiang, Li Fei-Fei, Zhang Ai-Guo, Zeng Zh ong-Ming, Zhan Wen-Shan, Han Xiu-Feng. Microfabrication of magnetic tunnel junctions on 4-inch Si/SiO＿2 substrate*J. Acta Physica Sinica, 2004, 53(11): 3895-3901. DOI: 10.7498/aps.53.3895

Citation:

Wang Tian-Xing, Wei Hong-Xiang, Li Fei-Fei, Zhang Ai-Guo, Zeng Zh ong-Ming, Zhan Wen-Shan, Han Xiu-Feng. Microfabrication of magnetic tunnel junctions on 4-inch Si/SiO＿2 substrate*J. Acta Physica Sinica, 2004, 53(11): 3895-3901. DOI: 10.7498/aps.53.3895