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中国物理学会期刊
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Yu Lei, Yu Jian-Zu, Wang Yong-Kun. Measurement and analysis of thermal properties of SiNx thin filmsJ. Acta Physica Sinica, 2004, 53(2): 401-405. DOI: 10.7498/aps.53.401
Citation: Yu Lei, Yu Jian-Zu, Wang Yong-Kun. Measurement and analysis of thermal properties of SiNx thin filmsJ. Acta Physica Sinica, 2004, 53(2): 401-405. DOI: 10.7498/aps.53.401
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Measurement and analysis of thermal properties of SiNx thin films

Acta Phys. Sin., 2004, 53(2): 401-405.
DOI: 10.7498/aps.53.401
CSTR: 32037.14.aps.53.401
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