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中国物理学会期刊
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Qi Hong- Ji, Yi Kui, He Hong- Bo, Shao Jian- Da. The effect of sputtering particle energy on surface characteristics of Mo thin filmsJ. Acta Physica Sinica, 2004, 53(12): 4398-4404. DOI: 10.7498/aps.53.4398
Citation: Qi Hong- Ji, Yi Kui, He Hong- Bo, Shao Jian- Da. The effect of sputtering particle energy on surface characteristics of Mo thin filmsJ. Acta Physica Sinica, 2004, 53(12): 4398-4404. DOI: 10.7498/aps.53.4398
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The effect of sputtering particle energy on surface characteristics of Mo thin films

Acta Phys. Sin., 2004, 53(12): 4398-4404.
DOI: 10.7498/aps.53.4398
CSTR: 32037.14.aps.53.4398
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