Preparation of titanium nitride films by pulsed high-energy-density plasma and investigation of the tribological behavior of the film

Liu Yuan-Fu; Zhang Gu-Ling; Wang Jiu-Li; Liu Chi-Zi; Yang Si-Ze

doi:10.7498/aps.53.503

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Liu Yuan-Fu, Zhang Gu-Ling, Wang Jiu-Li, Liu Chi-Zi, Yang Si-Ze. Preparation of titanium nitride films by pulsed high-energy-density plasma and investigation of the tribological behavior of the filmJ. Acta Physica Sinica, 2004, 53(2): 503-507. DOI: 10.7498/aps.53.503

Citation:

Liu Yuan-Fu, Zhang Gu-Ling, Wang Jiu-Li, Liu Chi-Zi, Yang Si-Ze. Preparation of titanium nitride films by pulsed high-energy-density plasma and investigation of the tribological behavior of the filmJ. Acta Physica Sinica, 2004, 53(2): 503-507. DOI: 10.7498/aps.53.503

Citation:

Liu Yuan-Fu, Zhang Gu-Ling, Wang Jiu-Li, Liu Chi-Zi, Yang Si-Ze. Preparation of titanium nitride films by pulsed high-energy-density plasma and investigation of the tribological behavior of the filmJ. Acta Physica Sinica, 2004, 53(2): 503-507. DOI: 10.7498/aps.53.503