Liu Yuan-Fu, Han Jian-Min, Zhang Gu-Ling, Wang Jiu-Li, Chen Guang-Liang, Li Xue-Ming, Feng Wen-Ran, Fan Song-Hua, Liu Chi-Zi, Yang Si-Ze. Study on the microstructure and properties of (Ti, Al)N film deposited by pulsed high energy density plasmaJ. Acta Physica Sinica, 2005, 54(3): 1301-1305. DOI: 10.7498/aps.54.1301
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Citation:
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Liu Yuan-Fu, Han Jian-Min, Zhang Gu-Ling, Wang Jiu-Li, Chen Guang-Liang, Li Xue-Ming, Feng Wen-Ran, Fan Song-Hua, Liu Chi-Zi, Yang Si-Ze. Study on the microstructure and properties of (Ti, Al)N film deposited by pulsed high energy density plasmaJ. Acta Physica Sinica, 2005, 54(3): 1301-1305. DOI: 10.7498/aps.54.1301
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Liu Yuan-Fu, Han Jian-Min, Zhang Gu-Ling, Wang Jiu-Li, Chen Guang-Liang, Li Xue-Ming, Feng Wen-Ran, Fan Song-Hua, Liu Chi-Zi, Yang Si-Ze. Study on the microstructure and properties of (Ti, Al)N film deposited by pulsed high energy density plasmaJ. Acta Physica Sinica, 2005, 54(3): 1301-1305. DOI: 10.7498/aps.54.1301
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Citation:
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Liu Yuan-Fu, Han Jian-Min, Zhang Gu-Ling, Wang Jiu-Li, Chen Guang-Liang, Li Xue-Ming, Feng Wen-Ran, Fan Song-Hua, Liu Chi-Zi, Yang Si-Ze. Study on the microstructure and properties of (Ti, Al)N film deposited by pulsed high energy density plasmaJ. Acta Physica Sinica, 2005, 54(3): 1301-1305. DOI: 10.7498/aps.54.1301
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