Mechanism of nodule growth in ion beam sputtering films

Zhang Dong-Ping; Qi Hong-Ji; Shao Jian-Da; Fan Rui-Ying; Fan Zheng-Xiu

doi:10.7498/aps.54.1385

Zhang Dong-Ping, Qi Hong-Ji, Shao Jian-Da, Fan Rui-Ying, Fan Zheng-Xiu. Mechanism of nodule growth in ion beam sputtering filmsJ. Acta Physica Sinica, 2005, 54(3): 1385-1389. DOI: 10.7498/aps.54.1385

Citation:

Zhang Dong-Ping, Qi Hong-Ji, Shao Jian-Da, Fan Rui-Ying, Fan Zheng-Xiu. Mechanism of nodule growth in ion beam sputtering filmsJ. Acta Physica Sinica, 2005, 54(3): 1385-1389. DOI: 10.7498/aps.54.1385

Citation:

Zhang Dong-Ping, Qi Hong-Ji, Shao Jian-Da, Fan Rui-Ying, Fan Zheng-Xiu. Mechanism of nodule growth in ion beam sputtering filmsJ. Acta Physica Sinica, 2005, 54(3): 1385-1389. DOI: 10.7498/aps.54.1385