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中国物理学会期刊
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Zhang Chao-Hui, Luo Jian-Bin, Wen Shi-Zhu. Effects of nano-scale particles in chemical mechanical polishing processJ. Acta Physica Sinica, 2005, 54(5): 2123-2127. DOI: 10.7498/aps.54.2123
Citation: Zhang Chao-Hui, Luo Jian-Bin, Wen Shi-Zhu. Effects of nano-scale particles in chemical mechanical polishing processJ. Acta Physica Sinica, 2005, 54(5): 2123-2127. DOI: 10.7498/aps.54.2123
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Effects of nano-scale particles in chemical mechanical polishing process

Acta Phys. Sin., 2005, 54(5): 2123-2127.
DOI: 10.7498/aps.54.2123
CSTR: 32037.14.aps.54.2123
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