Ions extraction and collection using the RF resonance method and taking into consideration the sputtering loss

Xie Guo-Feng; Wang De-Wu; Ying Chun-Tong

doi:10.7498/aps.54.2147

Search

x

Xie Guo-Feng, Wang De-Wu, Ying Chun-Tong. Ions extraction and collection using the RF resonance method and taking into consideration the sputtering lossJ. Acta Physica Sinica, 2005, 54(5): 2147-2152. DOI: 10.7498/aps.54.2147

Citation:

Xie Guo-Feng, Wang De-Wu, Ying Chun-Tong. Ions extraction and collection using the RF resonance method and taking into consideration the sputtering lossJ. Acta Physica Sinica, 2005, 54(5): 2147-2152. DOI: 10.7498/aps.54.2147

Citation:

Xie Guo-Feng, Wang De-Wu, Ying Chun-Tong. Ions extraction and collection using the RF resonance method and taking into consideration the sputtering lossJ. Acta Physica Sinica, 2005, 54(5): 2147-2152. DOI: 10.7498/aps.54.2147