Optical emission diagnosis of helicon-wave-plasma-enhanced chemical vapor deposition of nanocrystalline silicon

Yu Wei; Wang Bao-Zhu; Yang Yan-Bin; Lu Wan-Bing; Fu Guang-Sheng

doi:10.7498/aps.54.2394

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Yu Wei, Wang Bao-Zhu, Yang Yan-Bin, Lu Wan-Bing, Fu Guang-Sheng. Optical emission diagnosis of helicon-wave-plasma-enhanced chemical vapor deposition of nanocrystalline siliconJ. Acta Physica Sinica, 2005, 54(5): 2394-2398. DOI: 10.7498/aps.54.2394

Citation:

Yu Wei, Wang Bao-Zhu, Yang Yan-Bin, Lu Wan-Bing, Fu Guang-Sheng. Optical emission diagnosis of helicon-wave-plasma-enhanced chemical vapor deposition of nanocrystalline siliconJ. Acta Physica Sinica, 2005, 54(5): 2394-2398. DOI: 10.7498/aps.54.2394

Citation:

Yu Wei, Wang Bao-Zhu, Yang Yan-Bin, Lu Wan-Bing, Fu Guang-Sheng. Optical emission diagnosis of helicon-wave-plasma-enhanced chemical vapor deposition of nanocrystalline siliconJ. Acta Physica Sinica, 2005, 54(5): 2394-2398. DOI: 10.7498/aps.54.2394