A study on interfacial phase of Ti-Si-N composite films

Kong Ming; Hu Xiao-Ping; Dong Yun-Shan; Li Ge-Yang; Gu Ming-Yuan

doi:10.7498/aps.54.3774

Kong Ming, Hu Xiao-Ping, Dong Yun-Shan, Li Ge-Yang, Gu Ming-Yuan. A study on interfacial phase of Ti-Si-N composite filmsJ. Acta Physica Sinica, 2005, 54(8): 3774-3779. DOI: 10.7498/aps.54.3774

Citation:

Kong Ming, Hu Xiao-Ping, Dong Yun-Shan, Li Ge-Yang, Gu Ming-Yuan. A study on interfacial phase of Ti-Si-N composite filmsJ. Acta Physica Sinica, 2005, 54(8): 3774-3779. DOI: 10.7498/aps.54.3774

Citation:

Kong Ming, Hu Xiao-Ping, Dong Yun-Shan, Li Ge-Yang, Gu Ming-Yuan. A study on interfacial phase of Ti-Si-N composite filmsJ. Acta Physica Sinica, 2005, 54(8): 3774-3779. DOI: 10.7498/aps.54.3774