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中国物理学会期刊
Chen Guang-Liang, Ge Yuan-Jing, Zhang Yue-Fei, Zhang Guang-Qiu, Zhang Gu-Ling, Wang Jiu-Li, Liu Yuan-Fu, Gu Wei-Chao, Feng Wen-Ran, Liu Chi-Zi, Yang Si-Ze. Study on the preparation of high barrier hydrogenated carbon film and its propertiesJ. Acta Physica Sinica, 2005, 54(2): 818-823. DOI: 10.7498/aps.54.818
Citation: Chen Guang-Liang, Ge Yuan-Jing, Zhang Yue-Fei, Zhang Guang-Qiu, Zhang Gu-Ling, Wang Jiu-Li, Liu Yuan-Fu, Gu Wei-Chao, Feng Wen-Ran, Liu Chi-Zi, Yang Si-Ze. Study on the preparation of high barrier hydrogenated carbon film and its propertiesJ. Acta Physica Sinica, 2005, 54(2): 818-823. DOI: 10.7498/aps.54.818

Study on the preparation of high barrier hydrogenated carbon film and its properties

CSTR: 32037.14.aps.54.818
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