Search

x
中国物理学会期刊
Advanced Search
Wang Ting-Ting, Ye Chao, Ning Zhao-Yuan, Cheng Shan-Hua. Characterization and bonding configuration of SiCOH low-k filmsJ. Acta Physica Sinica, 2005, 54(2): 892-896. DOI: 10.7498/aps.54.892
Citation: Wang Ting-Ting, Ye Chao, Ning Zhao-Yuan, Cheng Shan-Hua. Characterization and bonding configuration of SiCOH low-k filmsJ. Acta Physica Sinica, 2005, 54(2): 892-896. DOI: 10.7498/aps.54.892
shu

Characterization and bonding configuration of SiCOH low-k films

Acta Phys. Sin., 2005, 54(2): 892-896.
DOI: 10.7498/aps.54.892
CSTR: 32037.14.aps.54.892
PDF
Get Citation

  • Abstract

    Authors and contacts

    References

Turn off MathJax
Article Contents

Catalog

    /

    DownLoad:  Full-Size Img  PowerPoint
    Return
    Return