Optical constants of Ge nanolayers in oxidation of SiGe alloys determined by ellipsometry

Huang Wei-Qi; Liu Shi-Rong

doi:10.7498/aps.54.972

Huang Wei-Qi, Liu Shi-Rong. Optical constants of Ge nanolayers in oxidation of SiGe alloys determined by ellipsometryJ. Acta Physica Sinica, 2005, 54(2): 972-976. DOI: 10.7498/aps.54.972

Citation:

Huang Wei-Qi, Liu Shi-Rong. Optical constants of Ge nanolayers in oxidation of SiGe alloys determined by ellipsometryJ. Acta Physica Sinica, 2005, 54(2): 972-976. DOI: 10.7498/aps.54.972

Citation:

Huang Wei-Qi, Liu Shi-Rong. Optical constants of Ge nanolayers in oxidation of SiGe alloys determined by ellipsometryJ. Acta Physica Sinica, 2005, 54(2): 972-976. DOI: 10.7498/aps.54.972