Negative bias temperature instability of HfN/HfO2 gated p-MOSFETs

Sa Ning; Kang Jin-Feng; Yang Hong; Liu Xiao-Yan; Zhang Xing; Han Ru-Qi

doi:10.7498/aps.55.1419

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Sa Ning, Kang Jin-Feng, Yang Hong, Liu Xiao-Yan, Zhang Xing, Han Ru-Qi. Negative bias temperature instability of HfN/HfO2 gated p-MOSFETsJ. Acta Physica Sinica, 2006, 55(3): 1419-1423. DOI: 10.7498/aps.55.1419

Citation:

Sa Ning, Kang Jin-Feng, Yang Hong, Liu Xiao-Yan, Zhang Xing, Han Ru-Qi. Negative bias temperature instability of HfN/HfO2 gated p-MOSFETsJ. Acta Physica Sinica, 2006, 55(3): 1419-1423. DOI: 10.7498/aps.55.1419

Citation:

Sa Ning, Kang Jin-Feng, Yang Hong, Liu Xiao-Yan, Zhang Xing, Han Ru-Qi. Negative bias temperature instability of HfN/HfO2 gated p-MOSFETsJ. Acta Physica Sinica, 2006, 55(3): 1419-1423. DOI: 10.7498/aps.55.1419