Deposition of diamond-like carbon and analysis of ion energy in CH4 or CH4+Ar dielectric barrier discharge plasma

Liu Yan-Hong; Zhang Jia-Liang; Wang Wei-Guo; Li Jian; Liu Dong-Ping; Ma Teng-Cai

doi:10.7498/aps.55.1458

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Liu Yan-Hong, Zhang Jia-Liang, Wang Wei-Guo, Li Jian, Liu Dong-Ping, Ma Teng-Cai. Deposition of diamond-like carbon and analysis of ion energy in CH4 or CH4+Ar dielectric barrier discharge plasmaJ. Acta Physica Sinica, 2006, 55(3): 1458-1463. DOI: 10.7498/aps.55.1458

Citation:

Liu Yan-Hong, Zhang Jia-Liang, Wang Wei-Guo, Li Jian, Liu Dong-Ping, Ma Teng-Cai. Deposition of diamond-like carbon and analysis of ion energy in CH4 or CH4+Ar dielectric barrier discharge plasmaJ. Acta Physica Sinica, 2006, 55(3): 1458-1463. DOI: 10.7498/aps.55.1458

Citation:

Liu Yan-Hong, Zhang Jia-Liang, Wang Wei-Guo, Li Jian, Liu Dong-Ping, Ma Teng-Cai. Deposition of diamond-like carbon and analysis of ion energy in CH4 or CH4+Ar dielectric barrier discharge plasmaJ. Acta Physica Sinica, 2006, 55(3): 1458-1463. DOI: 10.7498/aps.55.1458