Etching effects of low energy argon ion beam on porous anodic aluminum oxide membranes

Wang Sen; Yu Guo-Jun; Gong Jin-Long; Li Qin-Tao; Zhu De-Zhang; Zhu Zhi-Yuan

doi:10.7498/aps.55.1517

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Wang Sen, Yu Guo-Jun, Gong Jin-Long, Li Qin-Tao, Zhu De-Zhang, Zhu Zhi-Yuan. Etching effects of low energy argon ion beam on porous anodic aluminum oxide membranesJ. Acta Physica Sinica, 2006, 55(3): 1517-1522. DOI: 10.7498/aps.55.1517

Citation:

Wang Sen, Yu Guo-Jun, Gong Jin-Long, Li Qin-Tao, Zhu De-Zhang, Zhu Zhi-Yuan. Etching effects of low energy argon ion beam on porous anodic aluminum oxide membranesJ. Acta Physica Sinica, 2006, 55(3): 1517-1522. DOI: 10.7498/aps.55.1517

Citation:

Wang Sen, Yu Guo-Jun, Gong Jin-Long, Li Qin-Tao, Zhu De-Zhang, Zhu Zhi-Yuan. Etching effects of low energy argon ion beam on porous anodic aluminum oxide membranesJ. Acta Physica Sinica, 2006, 55(3): 1517-1522. DOI: 10.7498/aps.55.1517