Effect of hydrogen dilution on structure and optical properties of polycrystalline silicon films

Huang Rui; Lin Xuan-Ying; Yu Yun-Peng; Lin Kui-Xun; Zhu Zu-Song; Wei Jun-Hong

doi:10.7498/aps.55.2523

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Huang Rui, Lin Xuan-Ying, Yu Yun-Peng, Lin Kui-Xun, Zhu Zu-Song, Wei Jun-Hong. Effect of hydrogen dilution on structure and optical properties of polycrystalline silicon filmsJ. Acta Physica Sinica, 2006, 55(5): 2523-2528. DOI: 10.7498/aps.55.2523

Citation:

Huang Rui, Lin Xuan-Ying, Yu Yun-Peng, Lin Kui-Xun, Zhu Zu-Song, Wei Jun-Hong. Effect of hydrogen dilution on structure and optical properties of polycrystalline silicon filmsJ. Acta Physica Sinica, 2006, 55(5): 2523-2528. DOI: 10.7498/aps.55.2523

Citation:

Huang Rui, Lin Xuan-Ying, Yu Yun-Peng, Lin Kui-Xun, Zhu Zu-Song, Wei Jun-Hong. Effect of hydrogen dilution on structure and optical properties of polycrystalline silicon filmsJ. Acta Physica Sinica, 2006, 55(5): 2523-2528. DOI: 10.7498/aps.55.2523