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中国物理学会期刊
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Wu Zhen-Yu, Yang Yin-Tang, Wang Jia-You. Study of fluorinated amorphous carbon films prepared by electron cyclotron resonance chemical vapor depositionJ. Acta Physica Sinica, 2006, 55(5): 2572-2577. DOI: 10.7498/aps.55.2572
Citation: Wu Zhen-Yu, Yang Yin-Tang, Wang Jia-You. Study of fluorinated amorphous carbon films prepared by electron cyclotron resonance chemical vapor depositionJ. Acta Physica Sinica, 2006, 55(5): 2572-2577. DOI: 10.7498/aps.55.2572
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Study of fluorinated amorphous carbon films prepared by electron cyclotron resonance chemical vapor deposition

Acta Phys. Sin., 2006, 55(5): 2572-2577.
DOI: 10.7498/aps.55.2572
CSTR: 32037.14.aps.55.2572
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