Measurement of Mg content in Zn1－xMgxO films by inductively coupled plasma method

Yan Feng-Ping; Jian Shui-Sheng; Ogata K.; Koike K.; Sasa S.; Inoue M.; Yano M.

doi:10.7498/aps.55.3013

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Yan Feng-Ping, Jian Shui-Sheng, Ogata K., Koike K., Sasa S., Inoue M., Yano M.. Measurement of Mg content in Zn1－xMgxO films by inductively coupled plasma methodJ. Acta Physica Sinica, 2006, 55(6): 3013-3017. DOI: 10.7498/aps.55.3013

Citation:

Yan Feng-Ping, Jian Shui-Sheng, Ogata K., Koike K., Sasa S., Inoue M., Yano M.. Measurement of Mg content in Zn1－xMgxO films by inductively coupled plasma methodJ. Acta Physica Sinica, 2006, 55(6): 3013-3017. DOI: 10.7498/aps.55.3013

Citation:

Yan Feng-Ping, Jian Shui-Sheng, Ogata K., Koike K., Sasa S., Inoue M., Yano M.. Measurement of Mg content in Zn1－xMgxO films by inductively coupled plasma methodJ. Acta Physica Sinica, 2006, 55(6): 3013-3017. DOI: 10.7498/aps.55.3013